CPO Application

High-Speed Optical Module Bonder

H3 SERIES
Features
Wide process capability: eutectic, UV curing, dipping, dispensing, pre-sintering, TCB, LAB
High placement accuracy: ±1.5 μm (glass die)
Pressure control: 10–200 g ± 2 g + 1% F.S. (real-time display)
Chip size range: 0.15 mm × 0.15 mm – 15 mm × 15 mm
12-slot nozzle library
Supports DA + LAB and Fluxless TCB processes
Pulse heating technology (max ramp rate 100 °C/s)
Ideal for silicon-photonics PIC flip-chip bonding

Description

The H3 Series is designed for high-speed optical module chip packaging. It supports various processes such as eutectic bonding, UV curing, dipping, dispensing, pre-sintering, TCB, and LAB. With ±1.5 μm placement accuracy and real-time pressure display, it handles chip sizes from 0.15 mm to 15 mm.
Specification
Supported Processes Eutectic / UV curing / dipping / dispensing / pre-sintering / TCB / LAB
Placement Accuracy ±1.5 μm (glass die)
Pressure Control Range
10 – 200 g ± 2 g + 1 % F.S. (real-time display)
Chip Size Range 0.15 mm × 0.15 mm ~ 15 mm × 15 mm
Nozzle Library 12 slots
Heating Technology Pulse heating, max ramp rate 100 °C/s
Temperature Control Accuracy ±0.5 °C
Cooling Method High-efficiency air cooling system
Applications Silicon photonics PIC flip-chip bonding, 200 G/lane optical module packaging
Machine Dimensions Approx. W 1500 × D 1300 × H 1650 mm
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